Customization: | Available |
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Application: | 100 Lab Laboratory Clean Room |
Cleaning Method: | Automated Cleaning |
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Class | Maximum particles/m3 a | FED STD 209E | |||||
≥0.1 μm | ≥0.2 μm | ≥0.3 μm | ≥0.5 μm | ≥1 μm | ≥5 μm | equivalent | |
ISO 1 | 10b | d | d | d | d | e | |
ISO 2 | 100 | 24b | 10b | d | d | e | |
ISO 3 | 1,000 | 237 | 102 | 35b | d | e | Class 1 |
ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83b | e | Class 10 |
ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | d,e,f | Class 100 |
ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 | Class 1,000 |
ISO 7 | c | c | c | 352,000 | 83,200 | 2,930 | Class 10,000 |
ISO 8 | c | c | c | 3,520,000 | 832,000 | 29,300 | Class 100,000 |
ISO 9 | c | c | c | 35,200,000 | 8,320,000 | 293,000 | Room air |